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Репозиторий научных и учебно-методических публикаций
ФГАОУ ВО «Северо-Кавказский федеральный университет»
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Issue Date
Title
Author(s)
2019
The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles
Ambartsumov, M. G.
;
Амбарцумов, М. Г.
;
Tarala, V. A.
;
Тарала, В. А.
;
Krandievsky, S. O.
;
Крандиевский, С. О.
;
Kravtsov, A. A.
;
Кравцов, А. А.
;
Saytiev, A. B.
;
Саутиев, А. Б.
;
Mitrofanenko, L. M.
;
Митрофаненко, Л. М.
Discover
Author
1
Krandievsky, S. O.
1
Kravtsov, A. A.
1
Mitrofanenko, L. M.
1
Saytiev, A. B.
1
Амбарцумов, М. Г.
1
Кравцов, А. А.
1
Митрофаненко, Л. М.
1
Саутиев, А. Б.
1
Тарала, В. А.
Subject
1
AlN
1
Aluminum coated steel
1
Aluminum coatings
1
Aluminum nitride
1
Ellipsometry
1
PEALD
1
X-ray diffraction
Date issued
1
2019