1. Репозиторий научных публикаций СКФУ

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Issue DateTitleAuthor(s)
2015Growing aluminum nitride films by plasma-enhanced atomic layer deposition at low temperaturesTarala, V. A.; Тарала, В. А.; Altakhov, A. S.; Алтахов, А. С.; Martens, V. Y.; Мартенс, В. Я.; Lisitsyn, S. V.; Лисицын, С. В.

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