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Репозиторий научных и учебно-методических публикаций
ФГАОУ ВО «Северо-Кавказский федеральный университет»
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Issue Date
Title
Author(s)
2016
Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method
Tarala, V. A.
;
Тарала, В. А.
;
Altakhov, A. S.
;
Алтахов, А. С.
;
Ambartsumov, M. G.
;
Амбарцумов, М. Г.
;
Martens, V. Y.
;
Мартенс, В. Я.
;
Shevchenko, M. Y.
;
Шевченко, М. Ю.
Discover
Author
1
Altakhov, A. S.
1
Martens, V. Y.
1
Shevchenko, M. Y.
1
Алтахов, А. С.
1
Мартенс, В. Я.
Subject
1
Epitaxial growth