Features of the phase composition of films prepared by the simultaneous electric arc sputtering of graphite and chromium from two evaporators

Abstract

Abstract—The phase composition of a film obtained by the method of the simultaneous electric arc sputtering of graphite and chromium from two evaporators is studied by Raman and X-ray photoelectron spectroscopy. Analysis of the chemical state of atoms by X-ray photoelectron spectroscopy is performed before and after cleaning the surface of the film by bombardment with argon ions. Raman spectroscopy reveals amorphous carbon and graphite nanoparticles in the film. Taking into account the dependence of the ratio of the intensities of the D and G peaks in the spectrum on the size of crystallites, the linear size of carbon nanostructures is estimated as ~6 nm. According to X-ray photoelectron spectroscopy, the formation of chromium carbide in the film with a stoichiometry of Cr6.8C3.2, which is close to the stoichiometry of Cr7C3 heptachromium tricarbide, as well as Cr2O3, Cr–O–C and Cr(OH)3 chromium oxides, is found