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DC Field | Value | Language |
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dc.contributor.author | Altakhov, A. S. | - |
dc.contributor.author | Алтахов, А. С. | - |
dc.contributor.author | Kasharina, L. A. | - |
dc.contributor.author | Кашарина, Л. А. | - |
dc.contributor.author | Tarala, V. A. | - |
dc.contributor.author | Тарала, В. А. | - |
dc.date.accessioned | 2018-10-10T10:06:06Z | - |
dc.date.available | 2018-10-10T10:06:06Z | - |
dc.date.issued | 2016 | - |
dc.identifier.citation | Altakhov, A.S., Gorbunov, R.I., Kasharina, L.A., Latyshev, F.E., Tarala, V.A., Shreter, Y.G. Amorphous carbon buffer layers for separating free gallium nitride films // Technical Physics Letters. - 2016. - Volume 42. - Issue 11. - Pages 1076-1078 | ru |
dc.identifier.uri | https://www.scopus.com/record/display.uri?eid=2-s2.0-85000443074&origin=resultslist&sort=plf-f&src=s&nlo=&nlr=&nls=&sid=4571c9c342bce71328dbf4646312b3f0&sot=aff&sdt=cl&cluster=scopubyr%2c%222016%22%2ct&sl=174&s=AF-ID%28%22North+Caucasus+Federal+University%22+60070541%29+OR+AF-ID%28%22Stavropol+State+University%22+60070961%29+OR+AF-ID%28%22stavropolskij+Gosudarstvennyj+Tehniceskij+Universitet%22+60026323%29&relpos=18&citeCnt=0&searchTerm= | - |
dc.identifier.uri | http://hdl.handle.net/20.500.12258/3180 | - |
dc.description.abstract | The possibility of using amorphous diamond-like carbon (DLC) films for self-separation of gallium nitride (GaN) layers grown by hydride vapor-phase epitaxy has been analyzed. DLC films have been synthesized by plasma-enhanced chemical vapor deposition under low pressure on sapphire (Al2O3) substrates with a (0001) crystallographic orientation. The samples have been studied by the methods of Raman scattering and X-ray diffraction analysis. It is shown that thin DLC films affect only slightly the processes of nucleation and growth of gallium nitride films. Notably, the strength of the “GaN film–Al2O3” substrate interface decreases, which facilitates separation of the GaN layers | ru |
dc.language.iso | en | ru |
dc.publisher | Amorphous carbon buffer layers for separating free gallium nitride films | ru |
dc.relation.ispartofseries | Technical Physics Letters | - |
dc.subject | Nitride films | ru |
dc.subject | Amorphous carbon buffer layers | ru |
dc.title | Amorphous carbon buffer layers for separating free gallium nitride films | ru |
dc.type | Статья | ru |
vkr.amount | Pages 1076-1078 | ru |
vkr.inst | Инженерный институт | - |
Appears in Collections: | Статьи, проиндексированные в SCOPUS, WOS |
Files in This Item:
File | Description | Size | Format | |
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scopusresults 414 .pdf Restricted Access | 62.61 kB | Adobe PDF | View/Open | |
WoS 251 .pdf Restricted Access | 401.96 kB | Adobe PDF | View/Open |
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