Research of nanosized carbon films by x-ray photoelectronic spectroscopy

Abstract

The item offers a view on an analysis of research outcomes for diamond-like carbon (DLC) thin films. The samples were synthesized through plasma enhanced chemical vapour deposition by methane (СН4) and ethane (С2Н6) using Trion Phantom III. The substrates were monocrystalline silicon wafers with an orientation of (100). The impact of the synthesis factors on the structure and the composition of the DLC were evaluated with X-ray photoelectron spectroscopy while the measurements were performed on a photoelectron spectrometer PHI 5000 VERSA PROBE II. The outcomes suggest the presence of various carbon phases while based on the distribution with different hybridization degree we can make conclusion regarding the crystallinity of the structures obtained. The study revealed the presence of oxygen in the DLC thin film through the entire profile of the depth distribution, which is due to island-like nature of DLC films and not because of the sample being contaminated with oxygen. The distribution profiles allowed assessing the film layer